AST(Advanced Spectral Technology)

AST(Advanced Spectral Technology)

Advanced Spectral Technology (AST) delivers industry-leading inspection and metrology solutions for critical process control. Imaging technology spans visible, infrared (NIR, SWIR, MWIR), and UV spectrums. Applications include defect detection, critical dimension (CD), overlay metrology, wafer thickness (TTV), etch depth (trench, TSVs, TGVs), and wafer shape. Our high-precision systems are designed & manufactured to achieve optimum performance and reliability in production and lab environments. Integrated EFEM options support all wafer sizes (100, 150, 200, & 300mm) and load-port fo

Defect; Particle; Contam. Detection/Review/Inspect., Die Inspection; Die Shear, Fiber Optic Inspection Instruments, Film Thickness; Uniformity Measurement; Ellipsometer, Flat; Notch Finding System, Instruments; Bench Top Test, Line Width; Critical Dimension (CD) Measurement, Metrology; Topology; Nanotopography; Flatness; Cryst.Orient., Microscopes: Confocal Scanning; 3-D Video, Microscopes: Optical Microscopes, Overlay Measurement, Thermal Sensing, Measurement, Analysis, Wire Bonding Inspection; Test, Inspection and Metrology